A low-pressure gas-discharge ion source with a hollow cathode and an output-aperture diameter of 420 mm

✍ Scribed by A. I. Stognii; A. A. Serov; S. V. Koryakin; V. V. Pan’kov

• Book ID: 110167558
• Publisher: Springer
• Year: 2008
• Tongue: English
• Weight: 179 KB
• Volume: 51
• Category: Article
• ISSN: 0020-4412
• DOI: 10.1134/s0020441208020280