✦ LIBER ✦
A low-pressure encapsulated deep reactive ion etched resonant pressure sensor electrically excited and detected using `burst' technology
✍ Scribed by Melin, Jessica; Enoksson, Peter; Corman, Thierry; Stemme, Göran
- Book ID
- 121874788
- Publisher
- Institute of Physics
- Year
- 2000
- Tongue
- English
- Weight
- 397 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0960-1317
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