A low-cost optical inspection system for rapid surface roughness measurements of CrCN hard films

✍ Scribed by Kuo, Chil-Chyuan; Chen, Yi-Ruei; Tong, Cheng-Yi; Lee, Jyh-Wei

• Book ID: 121462860
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 1012 KB
• Volume: 124
• Category: Article
• ISSN: 0030-4026
• DOI: 10.1016/j.ijleo.2012.05.023