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A Low-Actuation-Voltage MEMS Digital-to-Analog Converter for a White-Light Interferometry System

✍ Scribed by C.W. Ma; H.H. Liao; W.C. Kuo; Y.J. Yang


Book ID
119355597
Publisher
Elsevier
Year
2011
Tongue
English
Weight
561 KB
Volume
25
Category
Article
ISSN
1877-7058

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