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A LOCOS process for an electrostatic microfabricated motor

✍ Scribed by Lee S. Tavrow; Stephen F. Bart; Jeffrey H. Lang; Martin F. Schlecht

Book ID
103957385
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
908 KB
Volume
23
Category
Article
ISSN
0924-4247

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✍ Hyeon Yoon; Jong Ha Park; Geun Hyung Kim πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 714 KB

## Abstract We describe the fabrication of a biomimically designed superhydrophobic poly(Ρ‐caprolactone) surface, which was obtained using a modified electrostatic process. The fabricated surface exhibits a micron‐sized pyramid structure consisting of accumulated droplets and nanofibres. By using t