✦ LIBER ✦

A Load-Lock-Compatible Nanomanipulation System for Scanning Electron Microscope

✍ Scribed by Zhang, Yan Liang; Zhang, Yong; Ru, Changhai; Chen, Brandon K.; Sun, Yu

Book ID: 118164912
Publisher: IEEE
Year: 2013
Tongue: English
Weight: 715 KB
Volume: 18
Category: Article
ISSN: 1083-4435
DOI: 10.1109/tmech.2011.2166162

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