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A Lithographic Resist-Based Simple Technology for High Yield Microfabrication of Air Bridges

✍ Scribed by Jie, S.

Book ID: 118202859
Publisher: IEEE
Year: 2012
Tongue: English
Weight: 236 KB
Volume: 21
Category: Article
ISSN: 1057-7157
DOI: 10.1109/jmems.2012.2222018

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