✦ LIBER ✦
A lithium liquid metal ion source with a narrow angle emission for writing beam lithography
✍ Scribed by E. Hesse; F.K. Naehring; J. Teichert
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 306 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0167-9317
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