A levitation-type linear synchronous microactuator using the Meissner effect of high-Tc superconductors
✍ Scribed by Kim Yong-Kweon; Makoto Katsurai; Hiroyuki Fujita
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 455 KB
- Volume
- 29
- Category
- Article
- ISSN
- 0924-4247
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✦ Synopsis
A linear synchronous microactuator with a superconducting stator, whose slider is levitated by the Meissner effect and driven by the Lorentz force, has been fabricated and tested . A YRaCuO superconducting film, covered with an etched copper film on polyimide, is used for the stator . An Nd-Fe-B permanent magnet is used for the slider . The total size of the actuator is of the order of a millimeter: the conductor's pitch on the stator is 0 .4 mm, and the width and thickness of the slider are 1 and 0.3 mm, respectively . The 8 mg slider stably levitates 1 mm above the stator in a magnetic field of 28 mT. The slider is driven by manually switching the current in the loop, which is placed on the stator. The slider is moved 3 .3 mm in 05 s while the current is 0.8 A . During that time, the average velocity is 7 mm/s . The driving force is found to be 30 µN from the experimental results of step responses. The drag force, including that produced by eddy currents in the stator, is estimated to be about 10 µN, approximately one quarter of the input driving force . This type of actuator in a micro vacuum chamber has a feasible application in the field of microelectromechanical systems (MEMS) .