A compact model for dielectric charging
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Prasad S. Sumant; Narayana R. Aluru; Andreas C. Cangellaris
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Article
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2009
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John Wiley and Sons
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English
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A unified, macroscopic, one-dimensional model is presented for the quantitative description of the process of dielectric charging in radio frequency micro-electromechanical systems (RF MEMS) switches. The fidelity of the model relies on the utilization of experimentally obtained data to assign value