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A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving

✍ Scribed by Guo, Z Y; Yang, Z C; Zhao, Q C; Lin, L T; Ding, H T; Liu, X S; Cui, J; Xie, H; Yan, G Z


Book ID
111986794
Publisher
Institute of Physics
Year
2009
Tongue
English
Weight
846 KB
Volume
20
Category
Article
ISSN
0960-1317

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