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A Large-Stroke MEMS Deformable Mirror Fabricated by Low-Stress Fluoropolymer Membrane

✍ Scribed by Tyng-Yow Chen; Chiu, C.-W.E.; Su, G.-D.J.


Book ID
119804553
Publisher
IEEE
Year
2008
Tongue
English
Weight
340 KB
Volume
20
Category
Article
ISSN
1041-1135

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