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A kinetic study of the chemical vapor deposition of iron films using iron pentacarbonyl

✍ Scribed by Zaera, Francisco.

Book ID: 126838003
Publisher: American Chemical Society
Year: 1991
Tongue: English
Weight: 468 KB
Volume: 7
Category: Article
ISSN: 0743-7463
DOI: 10.1021/la00054a028

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