A kinetic Monte Carlo simulation of chemical vapor deposition: non-monotonic variation of surface roughness with growth temperature

✍ Scribed by Martine Kalke; David V. Baxter

• Book ID: 117215723
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 230 KB
• Volume: 477
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/s0039-6028(01)00954-2