✦ LIBER ✦
A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches
✍ Scribed by R.G. Gordon; D. Hausmann; E. Kim; J. Shepard
- Publisher
- John Wiley and Sons
- Year
- 2003
- Tongue
- English
- Weight
- 269 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0948-1907
No coin nor oath required. For personal study only.