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A hollow cathode discharge modification as a source of sputtered atoms and their ions

โœ Scribed by D. Zhechev; V.I. Zhemenik; S. Tileva; G.V. Mishinsky; N. Pyrvanova


Book ID
114166646
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
172 KB
Volume
204
Category
Article
ISSN
0168-583X

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