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A highQmicromachined single crystal silicon bulk mode resonator with pre-etched cavity

✍ Scribed by Guoqiang Wu; Dehui Xu; Bin Xiong; Yuelin Wang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ultrasensitive mass balance based on a b

✍ Lee, J. E.-Y.; Bahreyni, B.; Zhu, Y.; Seshia, A. A. 📂 Article 📅 2007 🏛 American Institute of Physics 🌐 English ⚖ 563 KB