A highly sensitive a-Si photodetector array with integrated filter for optical detection in MEMS

✍ Scribed by Mohssen Moridi; Steve Tanner; Nicolas Wyrsch; Pierre-André Farine; Stephan Rohr

• Book ID: 108254940
• Publisher: Elsevier
• Year: 2009
• Weight: 576 KB
• Volume: 1
• Category: Article
• ISSN: 1876-6196
• DOI: 10.1016/j.proche.2009.07.341