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A highly robust process integration with scaled ONO interpoly dielectrics for embedded nonvolatile memory applications

✍ Scribed by Shum, D.P.; Hsing-Huang Tseng; Paulson, W.M.; Ko-Min Chang; Tobin, P.J.


Book ID
114536123
Publisher
IEEE
Year
1995
Tongue
English
Weight
209 KB
Volume
42
Category
Article
ISSN
0018-9383

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