A highly reliable mask inspection system
β Scribed by Tsujiyama, B.; Saito, K.; Kurihara, K.
- Book ID
- 114593456
- Publisher
- IEEE
- Year
- 1980
- Tongue
- English
- Weight
- 839 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0018-9383
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
The present paper reports the development of the refrigeration system that is applied to 70 MW class superconducting generators. The main subject in developing the refrigeration system for verification tests on site was to develop technology for removing impurities in helium gas, which largely affec
The present paper reports the development of the highly reliable refrigeration system (three types), which is applied for 70 MW class superconducting generators. R&D of the oil-free turbo type: In the turbo type of advanced refrigeration system, a complete oil free 80 K cold compressor was developed