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A high yield buried p-layer fabrication process for GaAs LSI circuits

✍ Scribed by Sadler, R.A.; Studtmann, G.D.; Geissberger, A.E.; Singh, H.P.

Book ID: 114537951
Publisher: IEEE
Year: 1991
Tongue: English
Weight: 932 KB
Volume: 38
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.81616

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