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A high temperature study of the reaction SiH4+H ⇋ SiH3+H2

✍ Scribed by A. Kunz; P. Roth

Book ID: 112008800
Publisher: Wiley (John Wiley & Sons)
Year: 1998
Tongue: English
Weight: 476 KB
Volume: 102
Category: Article
ISSN: 0372-8323
DOI: 10.1002/bbpc.19981020109

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