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A high speed impact actuator using multilayer piezoelectric ceramics

โœ Scribed by Shuo Hung Chang; Han-Chung Wang


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
545 KB
Volume
24
Category
Article
ISSN
0924-4247

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Multilayered LiNbO3 actuator for XY-stag
โœ Go Matsunami; Akito Kawamata; Hiroshi Hosaka; Takeshi Morita ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 836 KB

LiNbO 3 piezoelectric single crystal is expected to have a superior linearity and non-hysteresis. We have already demonstrated these distinguished piezoelectric performances using a Z-stage type LiNbO 3 multilayered actuator. In this study, a XY-stage type actuator was fabricated. By optimizing the