Multilayered LiNbO3 actuator for XY-stag
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Go Matsunami; Akito Kawamata; Hiroshi Hosaka; Takeshi Morita
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Article
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2008
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Elsevier Science
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English
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LiNbO 3 piezoelectric single crystal is expected to have a superior linearity and non-hysteresis. We have already demonstrated these distinguished piezoelectric performances using a Z-stage type LiNbO 3 multilayered actuator. In this study, a XY-stage type actuator was fabricated. By optimizing the