A high speed electrton beam lithography system.: J C Edison and R K Scudder, J Vac Sci Technol, 19 (4), 1981, 932–935

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 288 KB
• Volume: 35
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(85)90557-3