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A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique

โœ Scribed by Zhao, Shuangshuang; Hou, Changlun; Zhang, Juan; Bai, Jian; Yang, Guoguang


Book ID
120035882
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
959 KB
Volume
23
Category
Article
ISSN
0957-0233

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