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A high precision profilometer based on vertical scanning microscopic interferometry

✍ Scribed by Rong Dai; Tie-bang Xie; Wen Gong; Su-ping Chang

Book ID: 107482604
Publisher: Chinese Electronic Periodical Services
Year: 2008
Tongue: English
Weight: 578 KB
Volume: 12
Category: Article
ISSN: 1007-6417
DOI: 10.1007/s11741-008-0312-2

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