✦ LIBER ✦
A high ionization efficiency source for partially ionized beam deposition: S-N Mei and T-M Lu,J Vac Sci Technol,A6, 1988, 9–12
- Book ID
- 103472093
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 153 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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