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A Hafnium interlayer method to improve the thermal stability of NiSi film

โœ Scribed by Xiong-wei Yue; Li-chun Zhang; Yu-zhi Gao; Hai-yan Jin

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
321 KB
Volume
85
Category
Article
ISSN
0167-9317

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