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A graphical method for determining the parameters of a diffusion profile in silicon by infrared reflection spectroscopy

✍ Scribed by Erzsébet Hild; Jagdish K. Vij; Patrick Corcoran; Gerzson Végh

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 630 KB
Volume: 32
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(89)90050-6

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