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A global (volume averaged) model of a Cl 2 /Ar discharge: I. Continuous power

✍ Scribed by Thorsteinsson, E G; Gudmundsson, J T

Book ID: 120219734
Publisher: Institute of Physics
Year: 2010
Tongue: English
Weight: 621 KB
Volume: 43
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/43/11/115201

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