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A general procedure for the design of bulk acoustic wave filters

✍ Scribed by Lise Catherinot; Sylvain Giraud; Matthieu Chatras; Stéphane Bila; Dominique Cros; Thomas Baron; Sylvain Ballandras; Laetitia Estagerie; Philippe Monfraix

Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
834 KB
Volume
21
Category
Article
ISSN
1096-4290

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✦ Synopsis

This article presents a procedure for the design of bulk acoustic wave (BAW) filters. The procedure consists of optimizing the modified Butterworth-Van Dyke model of each resonator, considering appropriate technological parameters. The approach is demonstrated first to design a classical aluminum nitride-based BAW filter but remains valid for other piezoelectric layers, considering either longitudinal or transverse acoustic wave coupling. The approach is finally applied to the design of a lithium niobate (LiNbO 3 ) BAW filter for wide-band filtering applications. V

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