✦ LIBER ✦
A general coherent gradient sensor for film curvature measurements: Error analysis without temperature constraint
✍ Scribed by Liu, Cong; Zhang, Xingyi; Zhou, Jun; Zhou, Youhe
- Book ID
- 122672333
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 278 KB
- Volume
- 51
- Category
- Article
- ISSN
- 0143-8166
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