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A fully integrated temperature compensation technique for piezoresistive pressure sensors

โœ Scribed by Akbar, M.; Shanblatt, M.A.


Book ID
114542629
Publisher
IEEE
Year
1993
Tongue
English
Weight
532 KB
Volume
42
Category
Article
ISSN
0018-9456

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A new Sn02 low temperature deposition technique for integrated gas sensors is presented. Two different film thicknesses are investigated, as well as different catalysts . A correlation is established between the deposition parameters, the texture of the layers and the gas sensitivities . An explanat