A Frequency Selective Silicon Vibration Sensor with Direct Electrostatic Stiffness Modulation

✍ Scribed by Dirk Scheibner; Jürgen Wibbeler; Jan Mehner; Birgit Brämer; Thomas Gessner; Wolfram Dötzel

• Book ID: 111545851
• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 735 KB
• Volume: 37
• Category: Article
• ISSN: 0925-1030
• DOI: 10.1023/a:1024868617899