Fracture mechanics analysis of the effec
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Bin Gu; Hong-Yuan Liu; Yiu-Wing Mai; Xi-Qiao Feng; Shou-Wen Yu
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Article
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2008
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Elsevier Science
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English
โ 567 KB
Annealing temperature is very critical in the Smart-Cut process especially when material mismatch exists. Experiments have shown that high temperature along with thermal mismatch may fail the Smart-Cut process by inducing severe deformation or cracks on the films. The present paper, following our pr