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A finite element modeling of the low pressure plasma deposition process—I: Temperature analysis

✍ Scribed by Daeyong Lee

Publisher: Elsevier Science
Year: 1983
Tongue: English
Weight: 522 KB
Volume: 25
Category: Article
ISSN: 0020-7403
DOI: 10.1016/0020-7403(83)90046-2

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