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A FEM-based application for numerical calculations of ellipsometric data

✍ Scribed by Wiklund, H. ;Arwin, H. ;Järrendahl, K.

Publisher
John Wiley and Sons
Year
2008
Tongue
English
Weight
413 KB
Volume
205
Category
Article
ISSN
0031-8965

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✦ Synopsis

Abstract

For modeling of advanced optical structures there is a need for stronger and more flexible modeling tools. Our aim is to develop and verify an application tool for calculations based on the Finite Element Method (FEM) of optical structures. To be able to understand which effects in the results that arises from limitations in the model, we begin by verifying the application tool for the most basic surface structures and gradually increase the complexity of the structures. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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