✦ LIBER ✦
A fail-safe automatic vent control for Pfeiffer turbomolecular pumps: J W Stayt, Jr, J Vac Sci Technol, 21 (4), 1982, 1028–1029
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 137 KB
- Volume
- 35
- Category
- Article
- ISSN
- 0042-207X
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