A dual-stage control system for high-speed, ultra-precise linear motion

✍ Scribed by Yixu Song; Jianfa Wang; Kaiming Yang; Wensheng Yin; Yu Zhu

• Publisher: Springer
• Year: 2009
• Tongue: English
• Weight: 808 KB
• Volume: 48
• Category: Article
• ISSN: 0268-3768
• DOI: 10.1007/s00170-009-2327-x