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A direct robust feedback method for growth control of optical coatings by multiwavelength ellipsometry

✍ Scribed by M. Kildemo; B. Drévillon; O. Hunderi

Book ID: 114086360
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 174 KB
Volume: 313-314
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00869-9

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