A direct plasma injection system into an RFQ for clean and safe ion implantation

✍ Scribed by T. Takeuchi; T. Katayama; M. Okamura; K. Yano; A. Sakumi; T. Hattori; N. Hayashizaki; R.A. Jameson

• Book ID: 114165376
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 197 KB
• Volume: 188
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(01)01104-1