A direct and fast computing method for damage energy depth distribution in ion implanted materials

✍ Scribed by C. Vieu; A. Claverie; J. Faure; J. Beauvillain

• Book ID: 113278072
• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 770 KB
• Volume: 28
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/0168-583x(87)90109-1