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A differential resonator design using a bossed structure for applications in mechanical sensors

โœ Scribed by Harrie A.C. Tilmans; Siebe Bouwstra; Dominicus J. Ijntema; Miko Elwenspoek; Carl F. Klein


Book ID
103957461
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
747 KB
Volume
26
Category
Article
ISSN
0924-4247

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