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A device for taking X-ray micrographs within the SEM

โœ Scribed by H.R.F. Horn; H.G. Waltinger

Book ID
103488806
Publisher
Elsevier Science
Year
1980
Weight
342 KB
Volume
11
Category
Article
ISSN
0047-7206

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Scanning X-ray microfluorescence in a SE
Scanning X-ray microfluorescence in a SEM for the analysis of very thin overlayers
โœ E.S. Valamontes; J.C. Statharas; C. Nomicos ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 234 KB

In this paper, we used back-foil scanning X-ray microfluorescence (SXRF) and we examined the sensitivity of the technique for the analysis of very thin overlayers, where electron probe X-ray microanalysis (EPMA) reaches its detection limits. The lateral resolution of back-foil SXRF is also calculate