A dc-pulsed capacitively coupled planar Langmuir probe for plasma process diagnostics and monitoring

✍ Scribed by Šamara, V; Booth, J-P; Marneffe, J-F de; Milenin, A P; Brouri, M; Boullart, W

• Book ID: 119969180
• Publisher: Institute of Physics
• Year: 2012
• Tongue: English
• Weight: 847 KB
• Volume: 21
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/21/6/065004