A damage-free perfect planarization method using bias-sputtered SiO2

✍ Scribed by Hazuki, Y.; Moriya, T.

• Book ID: 114595921
• Publisher: IEEE
• Year: 1987
• Tongue: English
• Weight: 784 KB
• Volume: 34
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1987.22973