✦ LIBER ✦
A critical evaluation of low-energy electron impact cross sections for plasma processing modeling. II: Cl4, SiH4, and CH4
✍ Scribed by W. L. Morgan
- Book ID
- 105201641
- Publisher
- Springer
- Year
- 1992
- Tongue
- English
- Weight
- 721 KB
- Volume
- 12
- Category
- Article
- ISSN
- 0272-4324
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