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A contribution of diffusion-induced structural changes on the anisotropy of the diffusion of P in Si

✍ Scribed by Prof. L. N. Larikov; E. I. Bogdanov; E. A. Maximenko

Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
171 KB
Volume
25
Category
Article
ISSN
0232-1300

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