A continuum-based modeling of MEMS devices for estimating their resonant frequencies

✍ Scribed by Gyeong-Ho Kim; K.C. Park

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 873 KB
• Volume: 198
• Category: Article
• ISSN: 0045-7825
• DOI: 10.1016/j.cma.2008.07.017

✦ Synopsis

A continuum-based modeling of coupled electrostatics-structure interactions is presented for the frequency computations of MEMS devices. The present general formulation of electrostatics accounting for free space is validated first by specializing it to one-dimensional uniform motion of conducting surfaces and comparing the resulting electrostatics to conventional lumped models. The general coupled electrostatics-structure interactions are then applied for the prediction of resonant frequencies of MEMS devices due to bias-voltage changes and temperature variations. Comparisons of predicted resonant frequencies obtained by the present coupled electrostatics-structure interaction models with experimental results available in the literature demonstrate that the proposed continuum-based interaction modeling yields high-confidence predictions of resonant frequencies of MEMS devices.