A computer algorithm for accurate and repeatable profile analysis using anodization and stripping of silicon : Joseph C. Plunkett and Jack L. Stone. Solid-St. Electron.20, 447 (1977)

• Publisher: Elsevier Science
• Year: 1977
• Tongue: English
• Weight: 127 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(77)90226-8